Electrical properties in low temperature range (5K-300K) of Tantalum Oxide dielectric MIM capacitors. - Emilie Deloffre; L. Montès; Gérard Ghibaudo; Sylvie Bruyère; Serge Blonkowski; Stéphane Bécu; Mickael Gros-Jean; Sébastien Crémer (Microelectron. Reliab., 2005)