Self-Aligned Gate Thin-Channel β-Ga2O3MOSFETs. - Kyle J. Liddy; Nolan S. Hendricks; Andrew J. Green; Andreas Popp; Miles T. Lindquist; Kevin D. Leedy; Stephen E. Tetlak; Neil A. Moser; Günter Wagner; Kelson D. Chabak; Gregg H. Jessen (DRC, 2019)