Hybrid Si Etching for Performance Enhancement of the Atmospheric CMOS MEMS Infrared Sensor. - Pen-Sheng Lin; Yijia Wang; Ming-Ching Cheng; Yu-Chen Chen; Yu-Cheng Huang; Weileun Fang (IEEE SENSORS, 2020)

Monolithic Integration of Audio Filters for Frequency Response and THD Modulation in MEMS Microspeaker. - Yu-Chen Chen; Hsu-Hsiang Cheng; Ming-Ching Cheng; Zih-Song Hu; Weileun Fang (IEEE SENSORS, 2024)