Implementation and analysis of microwave switch in CMOS-MEMS technology. - Heng-Ming Hsu; Ching-Liang Dai; Ming-Ming Hsieh; Ming-Chang Tsai; Hsuan-Jung Peng (ISCAS, 2006)

Modeling and fabrication of a microelectromechanical microwave switch. - Ching-Liang Dai; Heng-Ming Hsu; Ming-Chang Tsai; Ming-Ming Hsieh; Ming-Wei Chang (Microelectron. J., 2007)