Modeling and Optimization of Multi-terraced-Plate Electrostatic Actuator. - Biyun Ling; Minli Cai; Biqing Zhou; Xiaoyue Wang; Yuhu Xia; Yuwei Han; Yaming Wu (IEEE SENSORS, 2024)

Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror. - Biyun Ling; Yuhu Xia; Minli Cai; Xiaoyue Wang; Yaming Wu (CoRR, 2024)