A novel linearly tunable butterfly-shape MEMS capacitor. - Mohammad Shavezipur; Amir Khajepour; S. M. Hashemi (Microelectron. J., 2008)

A probabilistic design optimization for MEMS tunable capacitors. - Mohammad Shavezipur; K. Ponnambalam; S. M. Hashemi; Amir Khajepour (Microelectron. J., 2008)