A multiscale systems approach to microelectronic processes. - Richard D. Braatz; Richard C. Alkire; Edmund G. Seebauer; Timothy O. Drews; Effendi Rusli; Mohan Karulkar; Feng Xue; Yan Qin; Michael Y. L. Jung; Rudiyanto Gunawan (Comput. Chem. Eng., 2006)