Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage. - Roel J. E. Merry; Mustafa Uyanik; Richard K. Koops; René van de Molengraft; Marijn van Veghel; Maarten Steinbuch (ACC, 2008)

Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM. - Roel J. E. Merry; Mustafa Uyanik; René van de Molengraft; Maarten Steinbuch; Richard K. Koops; Marijn van Veghel (ACC, 2009)