Fabrication of through silicon via with highly phosphorus-doped polycrystalline Si plugs for driving an active-matrix nanocrystalline Si electron emitter array. - Naokatsu Ikegami; Takashi Yoshida; Akira Kojima; Hiroshi Miyaguchi; Masanori Muroyama; Shinya Yoshida; Kentaro Totsu; Nobuyoshi Koshida; Masayoshi Esashi (NEMS, 2016)