Electrical calibration of spring-mass MEMS capacitive accelerometers. - Lingfei Deng; Vinay Kundur; Naveen Sai Jangala Naga; Muhlis Kenan Ozel; Ender Yilmaz; Sule Ozev; Bertan Bakkaloglu; Sayfe Kiaei; Divya Pratab; Tehmoor Dar (DATE, 2013)