Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications. - Néstor N. Peña-García; Luz Antonio Aguilera-Cortés; Max A. González-Palacios; Jean-Pierre Raskin; Agustín Leobardo Herrera-May (Sensors, 2018)