The influence of hydrogen and nitrogen on the formation of Si nanoclusters embedded in sub-stoichiometric silicon oxide layers. - Liliana Caristia; Giuseppe Nicotra; Corrado Bongiorno; Nicola Costa; Sebastiano Ravesi; Salvo Coffa; Riccardo De Bastiani; Maria Grazia Grimaldi; Corrado Spinella (Microelectron. Reliab., 2007)