Simulation And Characterization Of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) Based On Pzt/Soi Membranes. - Jacek Baborowski; Nicolas Ledermann; Paul Muralt; Daniel Schmitt 001 (Int. J. Comput. Eng. Sci., 2003)

Local Growth Of SOL-GEL Films By Means Of Microhotplates. - F. Calame; Jacek Baborowski; Nicolas Ledermann; Paul Muralt (Int. J. Comput. Eng. Sci., 2003)