The Enhancement Mechanisms of SiOx Hardness via Manipulation of Oxygen Content. - Hwanbeom Cho; Kyeongeun Kim; Minkyoung Kim; Chinam An; Noeul Sim; Youngseok Oh; Minseung Kim; Gyumyeong Kim; Jinkyung Park; Jin Jeon; Minjin Kim; Eunae Heo; et al. (IRPS, 2024)