Design of Perforated Membrane for Low-Noise Capacitive MEMS Accelerometers. - Atsushi Isobe; Yudai Kamada; Takashi Oshima; Yuki Furubayashi; Noriyuki Sakuma; Chisaki Takubo; Yasushi Tainaka; Keiki Watanabe; Tomonori Sekiguchi (IEEE SENSORS, 2018)