Generic Modeling of Non-planar Dielectrics for 2 1/2D Parasitic Extraction. - Nur Kurt-Karsilayan (IWSOC, 2005)

Efficient and accurate RIE modeling methodology for BEOL 2.5D parasitic extraction. - Nur Kurt-Karsilayan; Jim Falbo; Dusan Petranovic (MWSCAS, 2014)