2 MeV electron irradiation effects on the electrical characteristics of MOS capacitors with ALD Al2O3 dielectrics of different thickness. - Joan Marc Rafí; M. B. González; Kenichiro Takakura; I. Tsunoda; M. Yoneoka; Oihane Beldarrain; Miguel Zabala; Francesca Campabadal (Microelectron. Reliab., 2013)