12.9 A 1.55×0.85mm2 3ppm 1.0μA 32.768kHz MEMS-based oscillator. - Samira Zali Asl; Shouvik Mukherjee; Lijun Will Chen; Kimo Joo; Rajkumar Palwai; Niveditha Arumugam; P. Galle; Meghan Phadke; Charles Grosjean; Jim Salvia; Haechang Lee; Sudhakar Pamarti; et al. (ISSCC, 2014)