CMOS compatible process for suspended high-aspect-ratio integrated silicon microstructures. - Liang Qian; P. Z. Hong; Lina Sun; Zhenchuan Yang; Guizhen Yan (NEMS, 2011)

Post CMOS integration of high aspect ratio SOI MEMS devices. - Lina Sun; Liang Qian; P. Z. Hong; Guizhen Yan; Zhenchuan Yang (NEMS, 2011)