A coarse-to-fine angle automatic correction method for glassivation passivation parts wafer. - Chao Meng; Sizhe Lang; Fei Hao 004; Panyu Li; Jinfei Shi (ICMV, 2022)

Error Calibration Method Based on Perspective Mapping for Wafer Automatic Optical Inspection System. - Chao Meng; Jinfei Shi; Fei Hao 004; Panyu Li (IEEE Trans. Instrum. Meas., 2022)