Predictive discarding of wafers based on power leakage predictions from single layer misalignment data. - Geert H. van Kollenburg; Mike Holenderski; Patrizia Vasquez; Nirvana Meratnia (ISM, 2021)

Predictive Maintenance of Pins in the ECD Equipment for Cu Deposition in the Semiconductor Industry. - Umberto Amato; Anestis Antoniadis; Italia De Feis; Domenico Fazio; Caterina Genua; Irène Gijbels; Donatella Granata; Antonino La Magna; Daniele Pagano; Gabriele Tochino; Patrizia Vasquez (Sensors, 2023)