A 3 ppm 1.5 × 0.8 mm 2 1.0 µA 32.768 kHz MEMS-Based Oscillator. - Samira Zali Asl; James C. Salvia; Ginel C. Hill; Lijun Will Chen; Kimo Joo; Rajkumar Palwai; Niveditha Arumugam; Meghan Phadke; Shouvik Mukherjee; Haechang Lee; Charles Grosjean; Paul M. Hagelin; et al. (IEEE J. Solid State Circuits, 2015)