Charge Loss Improvement in 3D Flash Memory by Molecular Oxidation of Tunneling Oxide. - Pei-Ci Jhang; Chi-Pin Lu; Jung-Yu Shieh; Ling-Wu Yang; Tahone Yang; Kuang-Chao Chen; Hang-Ting Lue; Pei-Ying Du; Chih-Yuan Lu (IRPS, 2024)