Design and Fabrication of Hollow Mushroom-Like Cilia MEMS Vector Hydrophone. - Yanan Geng; Weirong Ren; Guojun Zhang; Peng Chen 049; Shan Zhu; Yifan Zhang; Yan Liu 066; Li Jia 003; Jie Zhang 119; Yansong Wang; Wendong Zhang 001 (IEEE Trans. Instrum. Meas., 2023)