Equipment challenges and solutions for diverse temporary bonding and de-bonding processes in 3D integration. - Markus Gabriel; Thomas Knauer; Peter Bisson; Sumant Sood; Wilfried Bair; Jim Hermanowski (3DIC, 2010)

300mm wafer thinning and backside passivation compatibility with temporary wafer bonding for 3D stacked IC applications. - Anne Jourdain; Thibault Buisson; Alain Phommahaxay; Mark Privett; Dan Wallace; Sumant Sood; Peter Bisson; Eric Beyne; Youssef Travaly; Bart Swinnen (3DIC, 2010)

Ultrathin wafer handling in 3D Stacked IC manufacturing combining a novel ZoneBOND™ temporary bonding process with room temperature peel debonding. - Alain Phommahaxay; Anne Jourdain; Greet Verbinnen; Tobias Woitke; Peter Bisson; Markus Gabriel; Walter Spiess; Alice Guerrero; Jeremy McCutcheon; Rama Puligadda; Pieter Bex; Axel Van den Eede; et al. (3DIC, 2011)