Plasma-etching processes for ULSI semiconductor circuits. - Michael Armacost; Peter D. Hoh; Richard Wise; Wendy Yan; Jeffrey J. Brown; John H. Keller; George A. Kaplita; Scott D. Halle; K. Paul Muller; Munir D. Naeem; Senthil Srinivasan; Hung Y. Ng; et al. (IBM J. Res. Dev., 1999)