Design Technology co-optimization for N10. - Julien Ryckaert; Praveen Raghavan; Rogier Baert; Marie Garcia Bardon; Mircea Dusa; Arindam Mallik; Sushil Sakhare; Boris Vandewalle; Piet Wambacq; Bharani Chava; Kris Croes; Morin Dehan; et al. (CICC, 2014)

Deep Learning-Based Defect Classification and Detection in SEM Images. - Bappaditya Dey; Dipam Goswami; Sandip Halder; Kasem Khalil; Philippe Leray 002; Magdy A. Bayoumi (CoRR, 2022)

Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach. - Bappaditya Dey; Enrique Dehaerne; Kasem Khalil; Sandip Halder; Philippe Leray 002; Magdy A. Bayoumi (CoRR, 2022)

Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance. - Bappaditya Dey; Anh Tuan Ngo; Sara Sacchi; Víctor Blanco; Philippe Leray 002; Sandip Halder (PKDD/ECML Workshops (4), 2023)

Deep learning denoiser assisted roughness measurements extraction from thin resists with low Signal-to-Noise Ratio(SNR) SEM images: analysis with SMILE. - Sara Sacchi; Bappaditya Dey; Iacopo Mochi; Sandip Halder; Philippe Leray 002 (CoRR, 2023)

Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS. - Ying-Lin Chen; Jacob Deforce; Vic De Ridder; Bappaditya Dey; Víctor Blanco; Sandip Halder; Philippe Leray 002 (CoRR, 2024)

Exploring Machine Learning for Semiconductor Process Optimization: A Systematic Review. - Ying-Lin Chen; Sara Sacchi; Bappaditya Dey; Víctor Blanco; Sandip Halder; Philippe Leray 002; Stefan De Gendt (IEEE Trans. Artif. Intell., 2024)