Measurement of Nano-Displacement Based on In-Plane Suspended-Gate MOSFET Detection Compatible with a Front-End CMOS Process. - Éric Colinet; Cedric Durand; Patrick Audebert; Philippe Renaux; Denis Mercier; Laurent Duraffourg; Eric Ollier; Fabrice Casset; Pascal Ancey; Lionel Buchaillot; Adrian M. Ionescu (ISSCC, 2008)