Fabrication and Characterizations of PbZrxTi1-xO3 (PZT) Ultrasonic Sensing Chips. - Ming-Ling Lee; Shih-Ming Chen; Jia-Jie Jhang; Lin-Sin Lu; Shu-Ting Yang; Pin-En Chiu; Yu-Sheng Tsai; Yewchung Sermon Wu; Chin-Chi Cheng; Hsiang Chen; Jung Han (IEEE Access, 2022)