Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip. - Ching-Liang Dai; Po-Wei Lu; Chienliu Chang; Cheng-Yang Liu (Sensors, 2009)

Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process. - Ching-Liang Dai; Po-Wei Lu; Chyan-Chyi Wu; Chienliu Chang (Sensors, 2009)