Applications of control systems and optimization in the design of semiconductor capital equipment. - Upendra Ummethala; John J. Hench; Anne van Lievenoogen; Pradeep Subrahmanyan (ACC, 2013)

Overlay Control in HAR device integration. - Pradeep Subrahmanyan; Wonjae Lee; Jeff Lischer; Ram Karur; Olga Kucher; Stan Todorov; Adaeze Osonkie (IMW, 2023)