Design And Fabrication Of SIO2 Micromechanical Structures Inside Anisotropically Etched Cavity. - Prem Pal; Suneet Tuli; Sudhir Chandra (Int. J. Comput. Eng. Sci., 2003)

MEMS components with perfectly protected edges and corners in Si{110} wafers. - Prem Pal; Kazuo Sato; Hirotaka Hida (MHS, 2011)

Arrow Shaped Microcantilever Beams for Enhancing Mass Sensitivity. - Akarapu Ashok; Nagesh Kumar Sahu; Prem Pal; Ashok Kumar Pandey (IEEE SENSORS, 2018)

Microstructures with Protected Convex Corners in Modified KOH Solution Exhibiting High-Speed Silicon Etching. - Avvaru Venkata Narasimha Rao; Veerla Swarnalatha; Ashok Kumar Pandey; Prem Pal (IEEE SENSORS, 2018)