An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process. - Qianhuang Chen; Tianyang Shao; Yan Xing (Sensors, 2020)

Damage profile model of nanostructure fabricated by Focused Helium Ion Beam. - Chenglong Liu; Qi Li; Qianhuang Chen; Yan Xing (NEMS, 2021)