Fabrication of complicated three dimensional structures utilizing multi-stack bonding. - Mingda Zhou; Yilong Hao; Chengchen Gao; Zhihong Li; Qifang Hu (NEMS, 2009)

Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer. - Qifang Hu; Chengchen Gao; Yilong Hao; Dacheng Zhang; Guizhen Yan; Yangxi Zhang (NEMS, 2010)

Design of a novel low cross-axis sensitivity micro-gravity sandwich capacitance accelerometer. - Qifang Hu; Chengchen Gao; Yangxi Zhang; Jian Cui; Yilong Hao (NEMS, 2011)