Polar Axis Orientation Control of Hafnium-Based Ferroelectric Capacitors with in-Situ AC Electric Bias During Rapid Thermal Annealing. - Zhaomeng Gao; Tianjiao Xin; D. Kai; Qiwendong Zhao; Yiwei Wang; Cheng Liu; Yilin Xu; Rui Wang; Guangjie Shi; Yunzhe Zheng; Yonghui Zheng; Yan Cheng; et al. (VLSI Technology and Circuits, 2024)