Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices. - Carlo Trigona; Suhail Ahmed Almani; Alireza Mehdi; Giuliano A. Salerno; Vincenzina Strano; Ausrine Bartasyte; Samuel Margueron; Salvatore Baglio; Quentin Micard (ROSE, 2024)