Precise EOT regrowth extraction enabling performance analysis of low temperature extension first devices. - Jessy Micout; Quentin Rafhay; Xavier Garros; Mikaël Cassé; Jean Coignus; Luca Pasini; Cao-Minh Vincent Lu; Nils Rambal; Claire Fenouillet-Béranger; Laurent Brunet; G. Romano; R. Gassilloud; et al. (ESSDERC, 2017)

Breakthrough Processes for Si CMOS Devices with BEOL Compatibility for 3D Sequential Integrated more than Moore Analog Applications. - Daphnée Bosch; Abygaël Viey; Tadeu Mota Frutuoso; P. Lheritier; C. Licitra; Nada Zerhouni; A. Albouy; Laurent Brunet; A. Magalhaes-Lucas; L. M. B. da Silva; H. Boutry; M. Husien Fahmy Taha Abdelrahman; et al. (VLSI Technology and Circuits, 2024)