New Access to Soft Breakdown Parameters of Low-k Dielectrics Through Localisation-Based Analysis. - Norbert Herfurth; Anne Beyreuther; Elham Amini; Christian Boit; Michél Simon-Najasek; Susanne Hübner; Frank Altmann; R. Herfurth; Chen Wu; Ingrid De Wolf; Kris Croes (IRPS, 2019)