A Novel Mems Fabry-Perot Microcavity Structure For Pressure Sensing Application. - W. J. Wang; R. M. Lin; T. T. Sun; D. G. Guo (Int. J. Comput. Eng. Sci., 2003)

Performance of a novel non-planar diaphragm for high-sensitivity structures. - W. J. Wang; R. M. Lin; Y. Ren; X. X. Li (Microelectron. J., 2003)