Semiconductor material analysis based on microcalorimeter EDS. - B. Simmnacher; R. Weiland; J. Höhne; F. v. Feilitzsch; C. Hollerith (Microelectron. Reliab., 2003)

Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation. - U. Muehle; A. Lenk; R. Weiland; H. Lichte (Microelectron. Reliab., 2005)