Single-Electron Transistor Operation of a Physically Defined Silicon Quantum Dot Device Fabricated by Electron Beam Lithography Employing a Negative-Tone Resist. - Shimpei Nishiyama; Kimihiko Kato; Yongxun Liu; Raisei Mizokuchi; Jun Yoneda; Tetsuo Kodera; Takahiro Mori (IEICE Trans. Electron., 2023)