Process technology for IBM 14-nm processor designs featuring silicon-on-insulator FinFETs. - Scott R. Stiffler; Ravikumar Ramachandran; W. Kirklen Henson; Noah Zamdmer; Kevin McStay; Giuseppe La Rosa; Kevin M. Boyd; Sungjae Lee; Claude Ortolland; Paul C. Parries (IBM J. Res. Dev., 2018)