Semiconductor SEM Image Defect Classification Using Supervised and Semi-Supervised Learning with Vision Transformers. - Chien-Fu Huang; Katherine Sieg; Leonid Karlinksy; Nash Flores; Rebekah Sheraw; Xin Zhang (CoRR, 2025)

Wafer Defect Root Cause Analysis with Partial Trajectory Regression. - Kohei Miyaguchi; Masao Joko; Rebekah Sheraw; Tsuyoshi Idé (CoRR, 2025)

Sequence-Aware Inline Measurement Attribution for Good-Bad Wafer Diagnosis. - Kohei Miyaguchi; Masao Joko; Rebekah Sheraw; Tsuyoshi Idé (CoRR, 2025)