An in-situ temperature measurement system for DUV lithography. - Woei Wan Tan; Reginald F. Y. Li (IEEE Trans. Instrum. Meas., 2003)

RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing. - Woei Wan Tan; Reginald F. Y. Li; Ai Poh Loh; Weng Khuen Ho (IEEE Trans. Instrum. Meas., 2008)