Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters. - Eustaquio Martínez-Cisneros; Luis A. Velosa-Moncada; Ernesto Alberto Elvira Hernández; Omar Isaac Nava-Galindo; Luz Antonio Aguilera-Cortés; René Pérez-Cuapio; Arxel de León; Francisco López-Huerta; Rolando Salgado; Agustín Leobardo Herrera-May (IEEE Access, 2021)