Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor. - Carlos H. Mastrangelo; Richard S. Muller (IEEE J. Solid State Circuits, 1991)

Surface micromachining for microelectromechanical systems. - James M. Bustillo; Roger T. Howe; Richard S. Muller (Proc. IEEE, 1998)

Surface-micromachined microoptical elements and systems. - Richard S. Muller; Kam Y. Lau (Proc. IEEE, 1998)

64×64 Low-loss and broadband digital silicon photonic MEMS switches. - Tae Joon Seok; Niels Quack; Sangyoon Han; Wencong Zhang; Richard S. Muller; Ming C. Wu (ECOC, 2015)