Design process interactions in shallow trench isolation chemical mechanical planarization for layout diversification and design optimization. - Conrad Guhl; Sascha Bott; I. Can Albayrak; Anne Weitzmann; Robert Krause; Joscha Kappel; Birgit Reinhold; Nan Wu; Michael Zier; Andreas Schüring; Hongwei Ma; Rico Hüselitz; et al. (ICICDT, 2021)