Development of sputtering conditions for PZT micro actuator with high piezoelectric property by Au-Pt buffer layer. - Rikiya Takita; Kazuyoshi Tsuchiya; Yasutomo Uetsuji (MHS, 2011)

Research on the surface in Au-Pt buffer layer for the high piezoelectric PZT. - Rikiya Takita; Kazuyoshi Tsuchiya; Yasutomo Uetsuji (MHS, 2012)