Performance analysis and modeling of deep trench decoupling capacitor for 32 nm high-performance SOI processors and beyond. - Balaji Jayaraman; Sneha Gupta; Yanli Zhang; Puneet Goyal; Herbert Ho; Rishikesh Krishnan; Sunfei Fang; Sungjae Lee; Douglas Daley; Kevin McStay; Bernhard Wunder; John Barth 001; et al. (ICICDT, 2012)