Application of tool science techniques to improve tool efficiency for a dry etch cluster tool. - Robert Havey; Lixin Wang; Dongjin Kim (WSC, 2011)

Improving cluster tools performance using colored Petri nets in semiconductor manifacturing. - Dongjin Kim; Emrah Cimren; Robert Havey; Abbas K. Zaidi (WSC, 2012)

A novel simulation methodology for modeling cluster tools. - Emrah Cimren; Robert Havey; Dongjin Kim (WSC, 2013)

Measuring cycle time through the use of the queuing theory formula (G/G/M). - D. J. Kim; Lixin Wang; Robert Havey (WSC, 2014)